US Patent 7301157 Cluster tool for microscopic processing of samples

Patent 7301157 was granted and assigned to FEI Company on November, 2007 by the United States Patent and Trademark Office.

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Current Assignee

FEI Company

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

73011570

Patent Inventor Names

Hendrik Nicolaas Slingerland0

Mark Theo Meuwese0

Bart Buijsse0

Bernardus Jacobus Marie Bormans0

Hendrik Gezinus Tappel0

Date of Patent

November 27, 2007

Patent Application Number

112374750

Date Filed

September 28, 2005

Patent Primary Examiner

Patent abstract

A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.