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US Patent 7264006 Ozonated water flow and concentration control apparatus and method

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Patent abstract

The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.

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edited on 14 Jul, 2023
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US Patent 07264006 Ozonated water flow and concentration control apparatus and method US Patent 7264006 Ozonated water flow and concentration control apparatus and method

Infobox
Patent Number
0726400600
Patent Number
726400600
Edits on 25 May, 2023
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Golden AI
edited on 25 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0726400600
Edits on 27 Mar, 2023
"Entity importer update"
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edited on 27 Mar, 2023
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
072640060
Date of Patent
September 4, 2007
0
Patent Application Number
112079890
Date Filed
August 19, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072640060
Patent Primary Examiner
‌
Peter A. Hruskoci
0
Edits on 26 Sep, 2022
"Entity importer update"
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Golden AI
edited on 26 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
072640060
Date of Patent
September 4, 2007
0
Patent Application Number
112079890
Date Filed
August 19, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072640060
Patent Primary Examiner
‌
Peter A. Hruskoci
0
Edits on 16 Jun, 2022
"Entity importer update"
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Golden AI
edited on 16 Jun, 2022
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Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07264006
Edits on 22 Nov, 2021
"Created via: Entity Importer"
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Golden AI
created this topic on 22 Nov, 2021
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 US Patent 07264006 Ozonated water flow and concentration control apparatus and method

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07264006
Date of patent
September 4, 2007
Patent application number
11207989
Date Filed
August 19, 2005
Patent primary examiner
‌
Peter A. Hruskoci

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