Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 4, 2007
Patent Application Number
11207989
Date Filed
August 19, 2005
Patent Primary Examiner
Patent abstract
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
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