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US Patent 7253615 Microelectromechanical system sensor and method for using

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Patent Inventor Names
Ertugrul Berkcan0
Wei-Cheng Tian0
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Patent abstract

According to some embodiments, an apparatus includes a movable portion through which a sensing current is to be conducted. The movable portion might comprise, for example, a beam or plate suspended above a well in a Microelectromechanical System (MEMS) substrate. The apparatus may also include a sensing portion coupled to the movable portion, and the movable portion and/or sensing portion may move in a direction normal to the substrate in response to a magnetic field.

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US Patent 07253615 Microelectromechanical system sensor and method for using US Patent 7253615 Microelectromechanical system sensor and method for using

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Patent Number
072536150
Patent Number
72536150
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072536150
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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
072536150
Date of Patent
August 7, 2007
0
Patent Application Number
108390950
Date Filed
May 5, 2004
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=072536150
Patent Primary Examiner
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Edward Lefkowitz
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https://pdfpiw.uspto.gov/.piw?Docid=07253615
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 US Patent 07253615 Microelectromechanical system sensor and method for using

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07253615
Date of patent
August 7, 2007
Patent application number
10839095
Date Filed
May 5, 2004
Patent primary examiner
‌
Edward Lefkowitz

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