Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wei-Cheng Tian1
Ertugrul Berkcan1
Date of Patent
August 7, 2007
1Patent Application Number
108390951
Date Filed
May 5, 2004
1Patent Primary Examiner
Patent abstract
According to some embodiments, an apparatus includes a movable portion through which a sensing current is to be conducted. The movable portion might comprise, for example, a beam or plate suspended above a well in a Microelectromechanical System (MEMS) substrate. The apparatus may also include a sensing portion coupled to the movable portion, and the movable portion and/or sensing portion may move in a direction normal to the substrate in response to a magnetic field.
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