US Patent 7238382 Method and system for characterizing porous materials

Patent 7238382 was granted and assigned to Tokyo Electron on July, 2007 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7238382

Patent Inventor Names

Dorel Ioan Toma0

Jianhong Zhu0

Date of Patent

July 3, 2007

Patent Application Number

10902578

Date Filed

July 30, 2004

Patent Primary Examiner

‌

William Phillip Fletcher, III

Patent abstract

A method and system for diagnosing the effectiveness of a treatment on a porous material. For example, the porous material can include a porous low dielectric constant material. In particular, the method can utilize FTIR spectroscopy to characterize the porosity of materials, and assess the effectiveness of sealing pores in the material.