US Patent 7238382 Method and system for characterizing porous materials
Patent 7238382 was granted and assigned to Tokyo Electron on July, 2007 by the United States Patent and Trademark Office.
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Patent Inventor Names
Dorel Ioan Toma0
Jianhong Zhu0
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Patent abstract
A method and system for diagnosing the effectiveness of a treatment on a porous material. For example, the porous material can include a porous low dielectric constant material. In particular, the method can utilize FTIR spectroscopy to characterize the porosity of materials, and assess the effectiveness of sealing pores in the material.
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US Patent 07238382 Method and system for characterizing porous materials US Patent 7238382 Method and system for characterizing porous materials
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Patent Number
07238382
Patent Number
7238382
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Official Website
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US Patent 07238382 Method and system for characterizing porous materials
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Is a
Current assignee
Patent jurisdiction
Patent number
07238382
Date of patent
July 3, 2007
Patent application number
10902578
Date Filed
July 30, 2004
Patent primary examiner
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