Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
May 15, 2007
Patent Application Number
10349775
Date Filed
January 23, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
A piezoelectrically controllable microfluid actor system, comprising a planar substrate which has at least one cavity on at least one side and has at least one passage which has an aperture in the cavity, and at least one diaphragm which has its border mounted on one side of the substrate so as to span the cavity, which has at least two superposed and interconnected diaphragm layers of which at least one is an electrically controllable piezoceramic element, and which is adapted to be deflected into the cavity by means of an electric drive.
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