US Patent 11879567 Microvalve using near-field-acoustic levitation and methods thereof

Microvalve assemblies are disclosed that in some examples include a body including first and second ports and a body plate. The microvalve assemblies further include an actuator assembly including one or more exterior plates coupled to a stack. One of the one or more exterior plates contacts the body plate to form a seat and thereby restrict fluid flow from the first port to the second port, when the stack is not energized. Additionally, the actuator assembly is configured to, when the stack is energized, periodically generate a gap between the one of the one or more exterior plates and the body plate via near-field-acoustic-levitation (NFAL) to allow fluid flow through the first and second ports. Advantageously, the microvalves of this technology are relatively small and consume minimal power, thereby overcoming size and power limitations of existing valves, including pneumatic valve technologies.