Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marc Fueldner0
Alfons Dehe0
Date of Patent
March 13, 2007
0Patent Application Number
108665820
Date Filed
June 11, 2004
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A micromechanical sensor and, in particular, a silicon microphone, includes a movable membrane and a counter element in which perforation openings are formed, opposite to the movable membrane via a cavity. The perforation openings are formed by slots, the width of which maximally corresponds to double the spacing defined by the cavity between the membrane and the counter element.
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