US Patent 7183566 Lithographic apparatus for manufacturing a device
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Patent Inventor Names
Arno Jan Bleeker0
Johannes Jacobus Matheus Baselmans0
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Patent abstract
To calibrate a lithographic apparatus having a programmable patterning means, a sensor, such as a CCD, CMOS sensor or photo-diode array, having detector elements larger than the size of a spot corresponding to a single pixel of the programmable patterning means is used. Pixels are selectively activated singly or in groups.
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US Patent 07183566 Lithographic apparatus for manufacturing a device US Patent 7183566 Lithographic apparatus for manufacturing a device
Infobox
Patent Number
071835660
Patent Number
71835660
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Patent Jurisdiction
Patent Number
071835660
Date of Patent
February 27, 2007
0Patent Application Number
108485830
Date Filed
May 19, 2004
0Official Website
Patent Primary Examiner
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US Patent 07183566 Lithographic apparatus for manufacturing a device
Infobox
Is a
Patent jurisdiction
Patent number
07183566
Date of patent
February 27, 2007
Patent application number
10848583
Date Filed
May 19, 2004
Patent primary examiner
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