Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Arno Jan Bleeker0
Johannes Jacobus Matheus Baselmans0
Date of Patent
February 27, 2007
0Patent Application Number
108485830
Date Filed
May 19, 2004
0Patent Primary Examiner
Patent abstract
To calibrate a lithographic apparatus having a programmable patterning means, a sensor, such as a CCD, CMOS sensor or photo-diode array, having detector elements larger than the size of a spot corresponding to a single pixel of the programmable patterning means is used. Pixels are selectively activated singly or in groups.
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