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US Patent 7153542 Assembly line processing method

Patent 7153542 was granted and assigned to Tegal Corporation on December, 2006 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Current Assignee
‌
Tegal Corporation
Date Filed
August 6, 2002
Date of Patent
December 26, 2006
Patent Application Number
10212546
Patent Citations Received
‌
US Patent 12060638 Deposition apparatus and methods using staggered pumping locations
3
‌
US Patent 11859282 Manifold valve for controlling multiple gases
4
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7153542
Patent Primary Examiner
‌
Marianne Padgett
Industry
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