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US Patent 7153542 Assembly line processing method

Patent 7153542 was granted and assigned to Tegal Corporation on December, 2006 by the United States Patent and Trademark Office.

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Patent
Patent

Patent attributes

Current Assignee
‌
Tegal Corporation
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7153542
Date of Patent
December 26, 2006
Patent Application Number
10212546
Date Filed
August 6, 2002
Patent Citations Received
‌
US Patent 12060638 Deposition apparatus and methods using staggered pumping locations
0
‌
US Patent 11859282 Manifold valve for controlling multiple gases
0
Patent Primary Examiner
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Marianne Padgett
Patent abstract

An apparatus for sequential processing of a workpiece comprises an assembly line processing system. The apparatus comprises multiple workpieces moving in an assembly line fashion under multiple process stations. The multiple process stations provide different processes onto the workpieces for a sequential processing of the workpieces. The sequential processing action is carried out by the movement of the workpieces under the various process stations.

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