US Patent 7139632 Enhanced process and profile simulator algorithms
Patent 7139632 was granted and assigned to Lam Research on November, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 1, 2004
0
Date of Patent
November 21, 2006
0
Patent Application Number
10932926
0
Patent Inventor Names
David Cooperberg
0
Vahid Vahedi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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