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US Patent 7118779 Reactor surface passivation through chemical deactivation

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
May 7, 2004
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Date of Patent
October 10, 2006
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Patent Application Number
10841585
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Patent Citations Received
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US Patent 11761079 Oxidation resistant protective layer in chamber conditioning
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US Patent 11920239 Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma
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US Patent 11830732 Selective passivation and selective deposition
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US Patent 11804373 Selective layer formation using deposition and removing
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US Patent 11749523 Methods for preparing self-assembled monolayers
Patent Inventor Names
Eric J. Shero
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Mohith Verghese
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
7118779
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Patent Primary Examiner
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Timothy Meeks
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