Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 3, 2006
Patent Application Number
11265429
Date Filed
November 1, 2005
Patent Citations Received
Patent Primary Examiner
Patent abstract
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.
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