US Patent 7003758 System and method for lithography simulation
Patent 7003758 was granted and assigned to Brion Technologies on February, 2006 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 1, 2004
0
Date of Patent
February 21, 2006
0
Patent Application Number
10815573
0
Patent Inventor Names
Luoqi Chen
0
Jun Ye
0
Xun Chen
0
Yen-Wen Lu
0
Yu Cao
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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