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US Patent 12112925 Plasma processing apparatus

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
January 12, 2022
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Date of Patent
October 8, 2024
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Patent Application Number
17574081
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Patent Citations
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US Patent 11257661 Plasma processing apparatus
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US Patent 7504040 Plasma processing apparatus and plasma processing method
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US Patent 7224568 Plasma processing method and plasma processing apparatus
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Patent Inventor Names
Kazuyuki Ikenaga
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Masahiro Sumiya
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Shigeru Shirayone
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Tomoyuki Tamura
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Masaki Ishiguro
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12112925
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Patent Primary Examiner
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Aiden Lee
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CPC Code
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H01J 37/32082
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H01J 37/32284
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H01J 37/32174
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H01J 37/32155
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H01J 37/32256
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H01J 37/32192
0
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H01L 21/67248
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H01L 21/6831
0
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H01L 21/67069
0
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H01L 21/3065
0
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