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US Patent 12108607 Devices with continuous electrode plate and methods of fabrication

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
121086070
Patent Inventor Names
Amrita Mathuriya0
Tanay Gosavi0
Noriyuki Sato0
Debraj Guhabiswas0
Sasikanth Manipatruni0
Niloy Mukherjee0
Date of Patent
October 1, 2024
0
Patent Application Number
175029420
Date Filed
October 15, 2021
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Patent Citations
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US Patent 7977720 Ferroelectric memory and its manufacturing method
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US Patent 8440508 Hydrogen barrier for ferroelectric capacitors
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US Patent 8916872 Method of forming a stacked low temperature diode and related devices
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US Patent 9847338 Semiconductor storage device and method for manufacturing the semiconductor storage device
0
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US Patent 9875784 Three-dimensional (3D) ferroelectric dipole metal-oxide semiconductor ferroelectric field-effect transistor (MOSFeFET) system, and related methods and systems
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US Patent 10847201 High-density low voltage non-volatile differential memory bit-cell with shared plate line
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US Patent 11063131 Ferroelectric or anti-ferroelectric trench capacitor with spacers for sidewall strain engineering
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US Patent 11043472 3D integrated ultra high-bandwidth memory
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...
Patent Primary Examiner
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S M Sohel Imtiaz
0
CPC Code
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H01L 28/60
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Patent abstract

An integration process including an etch stop layer for high density memory and logic applications and methods of fabrication are described. While various examples are described with reference to FeRAM, capacitive structures formed herein can be used for any application where a capacitor is desired. For instance, the capacitive structure can be used for fabricating ferroelectric based or paraelectric based majority gate, minority gate, and/or threshold gate.

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