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US Patent 12087542 Image contrast enhancement in sample inspection

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
November 1, 2021
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Date of Patent
September 10, 2024
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Patent Application Number
17516654
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Patent Citations
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US Patent 9666412 Method for charging and imaging an object
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US Patent 9165742 Inspection site preparation
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US Patent 9607805 Apparatus of plural charged-particle beams
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US Patent 6943349 Multi beam charged particle device
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US Patent 7244949 Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
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US Patent 7253410 Charge-control pre-scanning for e-beam imaging
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US Patent 7994476 Apparatus and method for enhancing voltage contrast of a wafer
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US Patent 8294095 Apparatus of plural charged particle beams with multi-axis magnetic lens
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US Patent 9140656 Method of operating a particle beam microscope and a particle beam microscope
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Patent Inventor Names
Frank Nan Zhang
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Yixiang Wang
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12087542
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Patent Primary Examiner
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Sean M Luck
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CPC Code
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H01J 2237/2817
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G01N 23/203
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H01J 37/261
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H01J 37/28
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G01N 23/2251
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H01J 2237/0048
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