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US Patent 12019376 Polymer brush adhesion promoter with UV cleavable linker

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
October 22, 2021
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Date of Patent
June 25, 2024
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Patent Application Number
17507933
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Patent Citations
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US Patent 9293328 Semiconductor device structures comprising a polymer bonded to a base material and methods of fabrication
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US Patent 9746774 Mitigation of EUV shot noise replicating into acid shot noise in photo-sensitized chemically-amplified resist (PS-CAR)
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US Patent 9362231 Molecular self-assembly in substrate processing
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US Patent 10031138 Hierarchical films having ultra low fouling and high recognition element loading properties
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US Patent 7741014 Patterning and alteration of molecules
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US Patent 8129093 Prevention of photoresist scumming
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Patent Inventor Names
Bharat Kumar
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Jing Guo
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Jennifer Church
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Dario Goldfarb
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Nelson Felix
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Ekmini A. De Silva
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12019376
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Patent Primary Examiner
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Jack S Chen
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