Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bharat Kumar0
Jing Guo0
Jennifer Church0
Dario Goldfarb0
Nelson Felix0
Ekmini A. De Silva0
Date of Patent
June 25, 2024
0Patent Application Number
175079330
Date Filed
October 22, 2021
0Patent Citations
Patent Primary Examiner
Patent abstract
A method of making an adhesion layer of an extreme ultraviolet (EUV) stack is presented. The method includes grafting an ultraviolet (UV) sensitive polymer brush on a hardmask, the polymer brush including a UV cleavable unit, depositing EUV resist over the polymer brush, exposing the EUV resist to remove the EUV resist in exposed areas by applying a developer, and flooding the exposed area with a UV light and a solvent developer to remove exposed portions of the polymer brush.
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