US Patent 12006209 MEMS and NEMS structures
Patent 12006209 was granted and assigned to Obsidian Sensors, Inc. on June, 2024 by the United States Patent and Trademark Office.
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US Patent 12006209 MEMS and NEMS structures
Article
Patent abstract
A method of manufacturing an electromechanical systems structure includes manufacturing sub-micron structural features. In some embodiments, the structural features are less than the lithographic limit of a lithography process.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Bing Wen0
Edward Chan0
John Hong0
Sean Andrews0
Tallis Chang0
Yaoling Pan0
Date of Patent
June 11, 2024
0Patent Application Number
169807920
Date Filed
March 14, 2019
0Patent Citations
Patent Primary Examiner
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