Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yaoling Pan0
Sean Andrews0
Edward Chan0
Bing Wen0
Tallis Chang0
John Hong0
Date of Patent
June 11, 2024
0Patent Application Number
169807920
Date Filed
March 14, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
A method of manufacturing an electromechanical systems structure includes manufacturing sub-micron structural features. In some embodiments, the structural features are less than the lithographic limit of a lithography process.
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