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US Patent 12006209 MEMS and NEMS structures

Patent 12006209 was granted and assigned to Obsidian Sensors, Inc. on June, 2024 by the United States Patent and Trademark Office.

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Patent abstract

A method of manufacturing an electromechanical systems structure includes manufacturing sub-micron structural features. In some embodiments, the structural features are less than the lithographic limit of a lithography process.

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