US Patent 11984296 Substrate support with improved process uniformity
Patent 11984296 was granted and assigned to Lam Research on May, 2024 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
January 18, 2021
0
Date of Patent
May 14, 2024
0
Patent Applicant
Patent Application Number
17151366
0
Patent Citations
•••
Patent Inventor Names
Zhigang Chen
0
Yuehong Fu
0
Fangli Hao
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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