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US Patent 11949203 Gas management system
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Is a
Patent
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Date Filed
January 10, 2019
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Date of Patent
April 2, 2024
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Patent Application Number
16965461
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Patent Citations
US Patent 9634455 Gas optimization in a gas discharge light source
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US Patent 9831627 System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
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US Patent 8929419 Excimer laser with gas purification
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US Patent 9819136 Gas mixture control in a gas discharge light source
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Patent Inventor Names
Dinesh Adinath Kanawade
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Yzzer Roman Gutierrez
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Edward Siqi Luo
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Walter Dale Gillespie
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11949203
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Patent Primary Examiner
Anshu Bhatia
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CPC Code
B01D 2257/204
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B01D 2257/2066
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B01D 2257/504
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B01D 2257/80
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B01F 35/2132
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G01N 33/0004
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B01D 2256/18
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B01D 53/04
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H01S 3/2366
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H01S 3/225
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