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US Patent 11949203 Gas management system

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Contents

Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
119492030
Patent Inventor Names
Dinesh Adinath Kanawade0
Yzzer Roman Gutierrez0
Edward Siqi Luo0
Walter Dale Gillespie0
Date of Patent
April 2, 2024
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Patent Application Number
169654610
Date Filed
January 10, 2019
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Patent Citations
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US Patent 9634455 Gas optimization in a gas discharge light source
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US Patent 9831627 System for reclaiming, rebalancing and recirculating laser gas mixtures used in a high energy laser system
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US Patent 8929419 Excimer laser with gas purification
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US Patent 9819136 Gas mixture control in a gas discharge light source
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Patent Primary Examiner
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Anshu Bhatia
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CPC Code
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B01D 2257/204
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B01D 2257/2066
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B01D 2257/504
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B01D 2257/80
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B01F 35/2132
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G01N 33/0004
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B01D 2256/18
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B01D 53/04
0
...
Patent abstract

A gas chamber supply system includes a gas source configured to fluidly connect to a gas chamber and to supply a gas mixture to the gas chamber, the gas source including: a pre-prepared gas supply including a gas mixture, the gas mixture including a plurality of gas components and lacking a halogen; a recycled gas supply including the gas mixture; and a fluid flow switch connected to the pre-prepared gas supply and to the recycled gas supply. The gas chamber supply also includes a control system configured to: determine if the relative concentration between the gas components within the recycled gas supply is within an acceptable range; and provide a signal to the fluid flow switch to thereby select one of the pre-prepared gas supply and the recycled gas supply to as the gas source based on the determination.

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