US Patent 11868056 Substrate processing apparatus
Patent 11868056 was granted and assigned to Tokyo Electron on January, 2024 by the United States Patent and Trademark Office.
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US Patent 11868056 Substrate processing apparatus
Article
Patent abstract
A heat treatment unit U
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kouichi Mizunaga0
Toshichika Takei0
Date of Patent
January 9, 2024
0Patent Application Number
180465670
Date Filed
October 14, 2022
0Patent Citations
Patent Primary Examiner
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