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US Patent 11854894 Integrated circuit device structures and double-sided electrical testing

Patent 11854894 was granted and assigned to Intel on December, 2023 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent
0

Patent attributes

Patent Applicant
Intel
Intel
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Current Assignee
Intel
Intel
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
118548940
Patent Inventor Names
Rishabh Mehandru0
Paul Fischer0
Bruce Block0
Doug Ingerly0
Kimin Jun0
Kevin O'Brien0
Patrick Morrow0
Valluri R. Rao0
...
Date of Patent
December 26, 2023
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Patent Application Number
171126970
Date Filed
December 4, 2020
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Patent Citations
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US Patent 8018008 Semiconductor device including a plurality of chips and method of manufacturing semiconductor device
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US Patent 7091534 Semiconductor device using low dielectric constant material film and method of fabricating the same
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US Patent 7402866 Backside contacts for MOS devices
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US Patent 7825472 Semiconductor device having a plurality of stacked transistors and method of fabricating the same
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US Patent 8395191 Semiconductor device and structure
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US Patent 8426888 Vertical semiconductor device with thinned substrate
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US Patent 9129926 Display device including thin film transistor
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US Patent 9171887 Semiconductor device and method of manufacturing same
0
...
Patent Primary Examiner
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Jesse Y Miyoshi
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CPC Code
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H01L 22/14
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H01L 29/7827
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H01L 29/7828
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Patent abstract

Integrated circuit cell architectures including both front-side and back-side structures. One or more of back-side implant, semiconductor deposition, dielectric deposition, metallization, film patterning, and wafer-level layer transfer is integrated with front-side processing. Such double-side processing may entail revealing a back side of structures fabricated from the front-side of a substrate. Host-donor substrate assemblies may be built-up to support and protect front-side structures during back-side processing. Front-side devices, such as FETs, may be modified and/or interconnected during back-side processing. Electrical test may be performed from front and back sides of a workpiece. Back-side devices, such as FETs, may be integrated with front-side devices to expand device functionality, improve performance, or increase device density.

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