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US Patent 11785776 Through array contact structure of three-dimensional memory device

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Contents

Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11785776
Patent Inventor Names
Guanping Wu
Wenguang Shi
Xianjin Wan
Baoyou Chen
Zhenyu Lu
Date of Patent
October 10, 2023
Patent Application Number
17944490
Date Filed
September 14, 2022
Patent Citations
‌
US Patent 9230974 Methods of selective removal of blocking dielectric in NAND memory strings
‌
US Patent 9331090 Compact three dimensional vertical NAND and method of making thereof
‌
US Patent 9356036 Semiconductor apparatus and manufacturing method of the same
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US Patent 9397046 Fluorine-free word lines for three-dimensional memory devices
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US Patent 9401371 Sacrificial spin-on glass for air gap formation after bl isolation process in single gate vertical channel 3D NAND flash
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US Patent 9576967 Method of suppressing epitaxial growth in support openings and three-dimensional memory device containing non-epitaxial support pillars in the support openings
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US Patent 10553604 Through array contact structure of three-dimensional memory device
‌
US Patent 10074664 Semiconductor memory device including slimming structure
...
Patent Citations Received
‌
US Patent 11985825 3D memory array contact structures
0
Patent Primary Examiner
‌
Calvin Y Choi
CPC Code
‌
H01L 23/535
‌
H01L 23/5226
Patent abstract

Embodiments of through array contact structures of a 3D memory device is disclosed. The 3D NAND memory device includes an alternating layer stack disposed on a substrate. The alternating layer stack includes a first region including an alternating dielectric stack, and a second region including an alternating conductor/dielectric stack. The memory device further comprises a barrier structure extending vertically through the alternating layer stack to laterally separate the first region from the second region, and multiple through array contacts in the first region each extending vertically through the alternating dielectric stack. At least one through array contact is electrically connected with a peripheral circuit.

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