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US Patent 11750169 Electrode-defined unsuspended acoustic resonator

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Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11750169
Patent Inventor Names
Di Lan
Wen-Qing Xu
Christopher S. Koeppen
Date of Patent
September 5, 2023
Patent Application Number
17661668
Date Filed
May 2, 2022
Patent Citations
‌
US Patent 9337799 Selective tuning of acoustic devices
‌
US Patent 10320361 Wide-band acoustically coupled thin-film BAW filter
‌
US Patent 10164601 BAW resonator having temperature compensation
‌
US Patent 11362640 Electrode-defined unsuspended acoustic resonator
‌
US Patent 7842134 Diamond based substrate for electronic devices
‌
US Patent 7843284 Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators
Patent Primary Examiner
‌
Jeffrey M Shin
CPC Code
‌
H03H 9/02228
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H03H 9/172
‌
H03H 9/176
‌
H03H 9/0547
‌
H03H 9/02102
‌
H03H 9/13

A bulk acoustic resonator operable in a bulk acoustic mode includes a resonator body mounted to a separate carrier that is not part of the resonator body. The resonator body includes a piezoelectric layer, a device layer, and a top conductive layer on the piezoelectric layer opposite the device layer. The piezoelectric layer is a single crystal of LiNbO

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