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US Patent 11362640 Electrode-defined unsuspended acoustic resonator

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
113626400
Patent Inventor Names
Di Lan0
Christopher S. Koeppen0
Wen-Qing Xu0
Date of Patent
June 14, 2022
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Patent Application Number
168741640
Date Filed
May 14, 2020
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Patent Citations Received
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US Patent 12076973 Bonded substrate including polycrystalline diamond film
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US Patent 12021499 Electrode defined resonator
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US Patent 11750169 Electrode-defined unsuspended acoustic resonator
Patent Primary Examiner
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Jeffrey M Shin
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CPC Code
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H03H 9/13
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H03H 9/02228
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H03H 9/172
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H03H 9/02102
0
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H03H 9/0547
0

A bulk acoustic resonator operable in a bulk acoustic mode includes a resonator body mounted to a separate carrier that is not part of the resonator body. The resonator body includes a piezoelectric layer, a device layer, and a top conductive layer on the piezoelectric layer opposite the device layer. The piezoelectric layer is a single crystal of LiNbO

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