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US Patent 11749729 Semiconductor device, integrated circuit component and manufacturing methods thereof

Patent 11749729 was granted and assigned to Taiwan Semiconductor Manufacturing Company on September, 2023 by the United States Patent and Trademark Office.

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Is a
Patent
Patent

Patent attributes

Patent Applicant
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
Current Assignee
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11749729
Patent Inventor Names
Ming-Fa Chen
Date of Patent
September 5, 2023
Patent Application Number
17218176
Date Filed
March 31, 2021
Patent Citations
‌
US Patent 9105490 Contact structure of semiconductor device
‌
US Patent 9236267 Cut-mask patterning process for fin-like field effect transistor (FinFET) device
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US Patent 9236300 Contact plugs in SRAM cells and the method of forming the same
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US Patent 9520482 Method of cutting metal gate
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US Patent 9576814 Method of spacer patterning to form a target integrated circuit pattern
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US Patent 11482548 Semiconductor device and imaging unit
‌
US Patent 8772109 Apparatus and method for forming semiconductor contacts
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US Patent 8785285 Semiconductor devices and methods of manufacture thereof
...
Patent Primary Examiner
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Dao H Nguyen
CPC Code
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H01L 23/5226
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H01L 23/481
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H01L 23/485
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H01L 24/19
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H01L 24/24
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H01L 21/823418
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H01L 24/13
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H01L 27/0688
...

A semiconductor device includes a gate structure, source/drain (S/D) elements, a first metallization contact and a second metallization contact. The S/D elements are respectively located at two different sides of the gate structure. The first metallization contact is located at and in contact with a first side of each of the S/D elements. The second metallization contact is located at and in contact with a second side of each of the S/D elements, where the semiconductor device is configured to receive a power signal through the second metallization contact. The first side is opposite to the second side along a stacking direction of the gate structure and the S/D elements, and the first side is closer to the gate structure than the second side is.

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