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US Patent 11685645 Micro-electromechanical system and method for producing same

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
April 8, 2021
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Date of Patent
June 27, 2023
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Patent Application Number
17913956
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Patent Citations
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US Patent 7998319 Process for the formation of miniaturized getter deposits and getter deposits so obtained
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US Patent 9005353 Getter structure including a gas-permeable material description
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US Patent 9051173 Treatment method of a getter material and encapsulation method of such getter material
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US Patent 9637377 Method for forming a micro-surface structure and for producing a micro-electromechanical component
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US Patent 9511998 MEMS device having a getter
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US Patent 10414647 Method for manufacturing a device comprising a hermetically sealed vacuum housing and getter
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US Patent 7789949 Getter device
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US Patent 7871660 Preparation of getter surfaces using caustic chemicals
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11685645
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Patent Primary Examiner
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Benjamin P Sandvik
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