US Patent 11685645 Micro-electromechanical system and method for producing same
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US Patent 11685645 Micro-electromechanical system and method for producing same
Article
A method of manufacturing a microelectromechanical system includes forming of an electromechanical element on a substrate. The method further includes preparation of an encapsulation package to form a sealed cavity integrating the electromechanical element, with the sealed cavity having a volume smaller than 10 mm
Infobox
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Patent Jurisdiction
Patent Number
116856450
Date of Patent
June 27, 2023
0Patent Application Number
179139560
Date Filed
April 8, 2021
0Patent Citations
Patent Primary Examiner
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