Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
June 20, 2023
0Patent Application Number
175006690
Date Filed
October 13, 2021
0Patent Citations
Patent Primary Examiner
CPC Code
The present invention concerns a chemical mechanical polishing pad having a polishing layer. The polishing layer contains an extruded sheet. The extruded sheet is prepared by extruding a compounded photopolymerizable composition followed by exposure to UV light.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
