Log in
Enquire now
‌

US Patent 11664213 Bevel edge removal methods, tools, and systems

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
0
Current Assignee
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
0
Date Filed
December 26, 2019
0
Date of Patent
May 30, 2023
0
Patent Applicant
Taiwan Semiconductor Manufacturing Company
Taiwan Semiconductor Manufacturing Company
0
Patent Application Number
16727533
0
Patent Citations
‌
US Patent 9146469 Middle layer composition for trilayer patterning stack
0
‌
US Patent 9213234 Photosensitive material and method of lithography
0
‌
US Patent 9223220 Photo resist baking in lithography process
0
‌
US Patent 9256133 Apparatus and method for developing process
0
‌
US Patent 9548303 FinFET devices with unique fin shape and the fabrication thereof
0
‌
US Patent 10857649 Method and apparatus for performing a polishing process in semiconductor fabrication
0
‌
US Patent 10073347 Semiconductor method of protecting wafer from bevel contamination
0
‌
US Patent 7979942 Substrate treatment apparatus and substrate treatment method
0
‌
US Patent 8020240 Substrate treatment apparatus
0
‌
US Patent 8796666 MOS devices with strain buffer layer and methods of forming the same
0
•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
11664213
0
Patent Primary Examiner
‌
Alexander Markoff
0
CPC Code
‌
H01L 21/67219
0
‌
H01L 21/67046
0
‌
H01L 21/304
0
‌
H01L 21/30625
0
‌
A46B 13/04
0
‌
A46B 2200/30
0
‌
B08B 1/002
0
‌
H01L 21/02087
0
‌
B08B 3/08
0
‌
B08B 5/04
0
•••

Find more entities like US Patent 11664213 Bevel edge removal methods, tools, and systems

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo
By using this site, you agree to our Terms of Service.