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US Patent 11664188 Edge detection system

Overview Structured Data Issues Contributors

Is a

1

Date Filed

May 10, 2021

1

Date of Patent

May 30, 2023

1

Patent Application Number

17316106

1

Patent Citations

US Patent 11216938 Systems and methods of optimal metrology guidance

1

US Patent 11415897 Calibrating stochastic signals in compact modeling

1

US Patent 11416977 Self-measurement of semiconductor image using deep learning

1

US Patent 11422096 Surface topography measurement apparatus and method

1

US Patent 11461889 Pattern inspection apparatus and pattern inspection method

1

US Patent 11468553 System and method for determining type and size of defects on blank reticles

1

US Patent 11501420 Reconstructing phase images with deep learning

1

US Patent 7124395 Automatic optical proximity correction (OPC) rule generation

1

US Patent 7175940 Method of two dimensional feature model calibration and optimization

1

US Patent 7247574 Method and apparatus for providing optical proximity features to a reticle pattern for deep sub-wavelength optical lithography

1

•••

Patent Jurisdiction

United States Patent and Trademark Office

1

Patent Number

1

Patent Primary Examiner

Nicole M Ippolito

1

CPC Code

1

G06T 2207/10061

1

G06T 2207/30148

1

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