US Patent 11633968 Low-particle gas enclosure systems and methods
Patent 11633968 was granted and assigned to Kateeva on April, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 14, 2020
0
Date of Patent
April 25, 2023
0
Patent Applicant
Patent Application Number
16791408
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Patent Inventor Names
Shandon Alderson
0
Alexey Stepanov
0
Eliyahu Vronsky
0
Justin Mauck
0
Alexander Sou-Kang Ko
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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