US Patent 11609499 Silicon-containing coating agent for pattern reversal
Patent 11609499 was granted and assigned to Nissan Chemical Corporation on March, 2023 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 10, 2017
0
Date of Patent
March 21, 2023
0
Patent Applicant
Patent Application Number
16082241
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Patent Inventor Names
Shuhei Shigaki
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Makoto Nakajima
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Hiroaki Yaguchi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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