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US Patent 11609499 Silicon-containing coating agent for pattern reversal

Patent 11609499 was granted and assigned to Nissan Chemical Corporation on March, 2023 by the United States Patent and Trademark Office.

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Patent attributes

Patent Applicant

Nissan Chemical Corporation

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Current Assignee

Nissan Chemical Corporation

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Shuhei Shigaki1

Makoto Nakajima1

Hiroaki Yaguchi1

Date of Patent

March 21, 2023

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Patent Application Number

160822411

Date Filed

February 10, 2017

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Patent Primary Examiner

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CPC Code

1

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A composition for flattening uneven substrates. The composition for flattening uneven substrates, which is applied on an organic pattern, includes a solvent and a polysiloxane including a hydrolysis condensate of a hydrolyzable silane, wherein the polysiloxane includes silanol groups in a proportion of 20 mol % or less with respect to Si atoms, and the weight-average molecular weight of the polysiloxane is 1,000-50,000.

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