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US Patent 11587758 Apparatus of plural charged-particle beams
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Is a
Patent
Date Filed
December 28, 2020
Date of Patent
February 21, 2023
Patent Application Number
17135969
Patent Citations
US Patent 10395886 Apparatus of plural charged-particle beams
US Patent 10236156 Apparatus of plural charged-particle beams
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11587758
Patent Primary Examiner
David E Smith
CPC Code
H01J 37/1474
H01J 37/1477
H01J 37/1478
H01J 2237/024
H01J 2237/0453
H01J 2237/0492
H01J 2237/103
H01J 2237/1205
H01J 2237/1516
H01J 2237/1534
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