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US Patent 11574799 Arc suppression device for plasma processing equipment

Patent 11574799 was granted and assigned to COMET Technologies USA, Inc. on February, 2023 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
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COMET Technologies USA, Inc.
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Date Filed
August 27, 2021
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Date of Patent
February 7, 2023
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Patent Application Number
17458764
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Patent Citations
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US Patent 10026594 RF impedance matching network
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US Patent 10026595 Apparatus for frequency tuning in a RF generator
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US Patent 10074518 Apparatus for controlled overshoot in a RF generator
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US Patent 10139285 Fully-differential amplification for pyrometry
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US Patent 10141788 Dynamic tuning in wireless energy transfer systems
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US Patent 10194518 Noise based frequency tuning and identification of plasma characteristics
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US Patent 10217618 Current threshold response mode for arc management
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US Patent 10224184 System and method for control of high efficiency generator source impedance
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US Patent 10224186 Plasma source device and methods
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US Patent 10263577 Gate drive circuit and method of operating the same
•••
Patent Citations Received
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US Patent 12131886 Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system
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US Patent 11972928 Method and system for plasma processing arc suppression
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11574799
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Patent Primary Examiner
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Srinivas Sathiraju
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