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US Patent 10139285 Fully-differential amplification for pyrometry

Patent 10139285 was granted and assigned to ADVANCED ENERGY INDUSTRIES, INC. on November, 2018 by the United States Patent and Trademark Office.

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Patent attributes

Patent Applicant
ADVANCED ENERGY INDUSTRIES, INC.
ADVANCED ENERGY INDUSTRIES, INC.
Current Assignee
ADVANCED ENERGY INDUSTRIES, INC.
ADVANCED ENERGY INDUSTRIES, INC.
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10139285
Date of Patent
November 27, 2018
Patent Application Number
14757702
Date Filed
December 23, 2015
Patent Citations Received
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US Patent 12132435 Method for repeatable stepper motor homing
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US Patent 12027351 Plasma non-uniformity detection
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US Patent 11521832 Uniformity control for radio frequency plasma processing systems
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US Patent 11527385 Systems and methods for calibrating capacitors of matching networks
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US Patent 11574799 Arc suppression device for plasma processing equipment
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US Patent 11605527 Pulsing control match network
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Patent Primary Examiner
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Patent abstract

This disclosure describes systems, methods, and apparatus for improving the signal-to-noise ratio, increasing sampling speed, and increasing the dynamic range of a pyrometer via improvements to the amplification section. In particular, single-stage non-differentiated amplifiers can be replaced with a differential amplifier circuit that increases gain without a proportional increase in noise. The differential amplifier circuit can comprise a pair of transimpedance amplifier circuits arranged in parallel that receive a differential current from a photo detector and generate a differential voltage output in response having a transconductance gain.

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