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US Patent 11489044 Nanosheet transistor bottom isolation
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Patent
Date Filed
December 28, 2020
Date of Patent
November 1, 2022
Patent Application Number
17134667
Patent Citations
US Patent 10680126 Photovoltaics on silicon
US Patent 10032867 Forming bottom isolation layer for nanosheet technology
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11489044
Patent Primary Examiner
Christine A Enad
CPC Code
H01L 29/785
H01L 21/76224
H01L 21/76837
H01L 21/823412
H01L 21/823431
H01L 21/823481
H01L 29/0649
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