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US Patent 11482436 Rotational indexer with additional rotational axes
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Is a
Patent
Current Assignee
Lam Research
Date Filed
January 10, 2019
Date of Patent
October 25, 2022
Patent Applicant
Lam Research
Patent Application Number
15733348
Patent Citations
US Patent 10109517 Rotational indexer with additional rotational axes
US Patent 10946634 Transfer device, curing system and curing method
Patent Citations Received
US Patent 11699610 Rotational indexer with additional rotational axes
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
11482436
Patent Primary Examiner
Gerald McClain
CPC Code
H01L 21/68764
B25J 18/007
B25J 9/043
B25J 9/042
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