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US Patent 11476145 Automatic ESC bias compensation when using pulsed DC bias

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Edits on 30 Apr, 2023

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Golden AI

edited on 30 Apr, 2023

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Patent Citations Received

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US Patent 11636998 Nanosecond pulser pulse generation

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Golden AI

edited on 30 Apr, 2023

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US Patent 10904996 Substrate support with electrically floating power supply

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Golden AI

edited on 30 Apr, 2023

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US Patent 10063062 Method of detecting plasma discharge in a plasma processing system

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Golden AI

edited on 29 Apr, 2023

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US Patent 10388544 Substrate processing apparatus and substrate processing method

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Golden AI

edited on 29 Apr, 2023

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US Patent 10923320 System for tunable workpiece biasing in a plasma reactor

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Golden AI

edited on 29 Apr, 2023

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US Patent 10923379 Methods for controlling clamping of insulator-type substrate on electrostatic-type substrate support structure

Edits on 29 Apr, 2023

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Golden AI

edited on 29 Apr, 2023

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US Patent 10535502 Symmetric plasma process chamber

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Golden AI

edited on 29 Apr, 2023

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US Patent 11095280 Efficient IGBT switching

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Golden AI

edited on 29 Apr, 2023

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US Patent 10580620 Symmetric plasma process chamber

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Golden AI

edited on 29 Apr, 2023

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US Patent 10453656 Symmetric plasma process chamber

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Golden AI

edited on 28 Apr, 2023

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US Patent 10665434 Slip ring, support mechanism, and plasma processing apparatus

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Golden AI

edited on 28 Apr, 2023

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US Patent 10447174 Additive synthesis of interleaved switch mode power stages for minimal delay in set point tracking

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Golden AI

edited on 28 Apr, 2023

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US Patent 10672616 Plasma processing apparatus and plasma processing method

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Golden AI

edited on 28 Apr, 2023

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US Patent 10109461 Plasma processing method

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Golden AI

edited on 28 Apr, 2023

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US Patent 10373811 Systems and methods for single magnetron sputtering

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Golden AI

edited on 28 Apr, 2023

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US Patent 10607813 Synchronized pulsing of plasma processing source and substrate bias

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Golden AI

edited on 28 Apr, 2023

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US Patent 10555412 Method of controlling ion energy distribution using a pulse generator with a current-return output stage

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Golden AI

edited on 27 Apr, 2023

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US Patent 10410877 Etching method

Edits on 27 Apr, 2023

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Golden AI

edited on 27 Apr, 2023

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US Patent 10283321 Semiconductor processing system and methods using capacitively coupled plasma

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Golden AI

edited on 27 Apr, 2023

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US Patent 10847346 High voltage resistive output stage circuit

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