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US Patent 11447866 High temperature chemical vapor deposition lid

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Edits on 30 Jul, 2023
"Resolve patent citation"
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Golden AI
edited on 30 Jul, 2023
Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114478660
Date of Patent
September 20, 2022
0
Patent Application Number
173500730
Date Filed
June 17, 2021
0
Patent Citations
‌
US Patent 11110425 Gas distribution plate for thermal deposition
0
‌
US Patent 11222772 Substrate processing apparatus
0
‌
US Patent 10358721 Semiconductor manufacturing system including deposition apparatus
0
‌
US Patent 10714315 Semiconductor reaction chamber showerhead
0
‌
US Patent 10832903 Process feed management for semiconductor substrate processing
0
‌
US Patent 10858737 Showerhead assembly and components thereof
0
‌
US Patent 10872803 Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
0
‌
US Patent 10872804 Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
0
‌
US Patent 10934619 Gas supply unit and substrate processing apparatus including the gas supply unit
0
‌
US Patent 11001925 Substrate processing apparatus
0
‌
US Patent 11251068 Substrate processing apparatus and substrate processing method
0
Patent Primary Examiner
‌
Rudy Zervigon
0
CPC Code
‌
C23C 16/52
0
‌
C23C 16/50
0
‌
C23C 16/455
0
‌
C23C 16/45565
0
‌
C23C 16/45536
0
‌
C23C 16/4412
0
Edits on 30 Apr, 2023
"update citations for inverse infoboxes"
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edited on 30 Apr, 2023
"update citations for inverse infoboxes"
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edited on 29 Apr, 2023
Edits on 27 Apr, 2023
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edited on 27 Apr, 2023
Edits on 22 Apr, 2023
"update citations for inverse infoboxes"
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edited on 22 Apr, 2023
Edits on 4 Apr, 2023
"update citations for inverse infoboxes"
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edited on 4 Apr, 2023
Edits on 24 Mar, 2023
"update citations for inverse infoboxes"
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edited on 24 Mar, 2023
Edits on 24 Mar, 2023
"Entity importer update"
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edited on 24 Mar, 2023
Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114478660
Date of Patent
September 20, 2022
0
Patent Application Number
173500730
Date Filed
June 17, 2021
0
Patent Citations
‌
US Patent 11110425 Gas distribution plate for thermal deposition
0
‌
US Patent 11222772 Substrate processing apparatus
0
‌
US Patent 10358721 Semiconductor manufacturing system including deposition apparatus
0
‌
US Patent 10714315 Semiconductor reaction chamber showerhead
0
‌
US Patent 10832903 Process feed management for semiconductor substrate processing
0
‌
US Patent 10858737 Showerhead assembly and components thereof
0
‌
US Patent 10872803 Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
0
‌
US Patent 10872804 Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
0
‌
US Patent 10934619 Gas supply unit and substrate processing apparatus including the gas supply unit
0
‌
US Patent 11001925 Substrate processing apparatus
0
‌
US Patent 11251068 Substrate processing apparatus and substrate processing method
0
Patent Primary Examiner
‌
Rudy Zervigon
0
CPC Code
‌
C23C 16/52
0
‌
C23C 16/50
0
‌
C23C 16/455
0
‌
C23C 16/45565
0
‌
C23C 16/45536
0
‌
C23C 16/4412
0
Edits on 22 Mar, 2023
"update citations for inverse infoboxes"
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Golden AI
edited on 22 Mar, 2023
Edits on 26 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 26 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 26 Sep, 2022
Edits on 25 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 25 Sep, 2022
Edits on 24 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 24 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 24 Sep, 2022
Edits on 23 Sep, 2022
"update citations for inverse infoboxes"
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Golden AI
edited on 23 Sep, 2022
"update citations for inverse infoboxes"
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edited on 23 Sep, 2022
Edits on 22 Sep, 2022
"update citations for inverse infoboxes"
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edited on 22 Sep, 2022
Edits on 21 Sep, 2022
"Created via: Entity Importer"
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created this topic on 21 Sep, 2022
Edits made to:
Infobox (+26 properties)
Article (+381 characters)
‌

 US Patent 11447866 High temperature chemical vapor deposition lid

Article

Process chamber lids, processing chambers and methods using the lids are described. The lid includes a pumping liner with a showerhead, blocker plate and gas funnel positioned therein. A liner heater is positioned on the pumping liner to control temperature in the pumping liner. Gas is flowed into the gas funnel using a dead-volume free one-way valve with a remote plasma source.

Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
114478660
Date of Patent
September 20, 2022
0
Patent Application Number
173500730
Date Filed
June 17, 2021
0
Patent Citations
‌
US Patent 11110425 Gas distribution plate for thermal deposition
0
‌
US Patent 11222772 Substrate processing apparatus
0
‌
US Patent 10358721 Semiconductor manufacturing system including deposition apparatus
0
‌
US Patent 10714315 Semiconductor reaction chamber showerhead
0
‌
US Patent 10832903 Process feed management for semiconductor substrate processing
0
‌
US Patent 10858737 Showerhead assembly and components thereof
0
‌
US Patent 10872803 Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
0
‌
US Patent 10872804 Apparatus and methods for isolating a reaction chamber from a loading chamber resulting in reduced contamination
0
‌
US Patent 10934619 Gas supply unit and substrate processing apparatus including the gas supply unit
0
‌
US Patent 11001925 Substrate processing apparatus
0
‌
US Patent 11251068 Substrate processing apparatus and substrate processing method
0
Patent Primary Examiner
‌
Rudy Zervigon
0
CPC Code
‌
C23C 16/52
0
‌
C23C 16/50
0
‌
C23C 16/455
0
‌
C23C 16/45565
0
‌
C23C 16/45536
0
‌
C23C 16/4412
0

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