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US Patent 11387078 Impedance matching device and impedance matching method

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
1
Date Filed
March 5, 2020
1
Date of Patent
July 12, 2022
1
Patent Application Number
16809950
1
Patent Citations
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US Patent 10026594 RF impedance matching network
1
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US Patent 10217608 Switching circuit for RF currents
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US Patent 10340879 Switching circuit
‌
US Patent 10431424 Parasitic capacitance compensation circuit
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US Patent 10431428 System for providing variable capacitance
‌
US Patent 10455729 Enclosure cooling system
‌
US Patent 10454453 RF impedance matching network
‌
US Patent 10460912 RF impedance matching circuit and systems and methods incorporating same
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US Patent 10699881 Impedance matching system, impedance matching method, and semiconductor processing apparatus thereof
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US Patent 10483090 Restricted capacitor switching
Patent Citations Received
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US Patent 11978612 Plasma processing apparatus
15
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US Patent 11791134 Impedance adjustment device
Patent Inventor Names
Tatsuya Morii
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
11387078
1
Patent Primary Examiner
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Dinh T Le
1
CPC Code
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H01J 37/32183
1
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H01J 37/241
1
Industry
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